KLA Tencor MicroXAM2 Interferometer/Profilomete
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Location
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Chemical Engineering, University of Birmingham (lab 102)
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Custodian
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Professor Mike Adams
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Applications
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Interferometry measures surface topography and wear volume through three-dimensional surface profiling. Equipment may be used to measure coating film thickness up to 60µm.
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| Specification |
- Vertical range up to 50 mm
- 100 mm x 100 mm sample positioning stage
- Phase mode for nanoscale resolution
- Surface roughness may be quantified
- Dissimilar materials analysis
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