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The Nanofilm imaging spectroscopic ellipsometer can be used to study thin films or microarrays. Properties such as thickness and refractive index can be measured. A lateral resolution of ~2 µm is possible. Wavelengths available from 360 - 1001 nm.

Location: C103a

Main contact: Pat Unwin

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Documents(PDF document)

Quick user quide 

Principles of Ellipsometry 

EP3 data collection manual 

EP4 modelling software manual 

Modelling and dispersion functions

Electrochemical cell manual

Solid liquid cell manual



NanoCharM consortium: lots of useful information on ellipsometry