Based in Engineering

The Science City cleanroom facility is a semiconductor fabrication laboratory in the School of Engineering and is a state-of-the-art facility operated as part of the Science City partnership with the University of Birmingham. The facility is a 150 m² ISO class 6 cleanroom, with the air filtered to 1000 times normal quality. This allows for the manufacture and testing of experimental electronic devices, as the facility is equipped with lithography, etching, deposition, oxidation, annealing and testing capabilities. More information about the cleanroom capabilities is available below.

• Lithography
• Etching and Wet Processing
• Deposition
• Thermal Oxidation and Annealing
• Metrology

Based in Physics

The agile microfabrication facility is established to fabricate solid state devices down to micrometre scale and enable research excellence in materials science, electronics, photonics, thermoelectrics, spintronics, MEMS/NEMS, microfluidics, sensors, energy storage and other science and technology disciplines. The nature of the research means frequent alterations to devices layout and processes modifications are required.

• UV Curing Chamber

• Microscope

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