The cleanroom is equipped to deposit metal and dielectric films.

Metal

• SVS 8 pocket electron beam evaporator. Integrated ion beam gun for in-situ etch prior and post deposition. Standard metals: Ni, Al, Ti, Cr, Pd, Ag, Au, Mo, W, Pt. Other metals available on request.
• Mantis Deposition sputter and PVD system. Flexible bespoke platform, incorporating sputter, thermal evaporation and e-beam evaporation sources. Standard metals: Ni, Al, Mo, W. Other metals, including reactive sputtering, avaliable on request.

• MoorfieldnanoPVD-S10A is a benchtop magnetron sputtering system with RF power supplies for deposition of metals or insulating materials such as oxides or nitrides.

  Key features

  3 magnetrons are water-cooled, allowing for high powers and sustained operation, and sized for accepting industry-standard 50mm diameter targets. The vacuum chamber is equipped with Edwards turbomolecular pumping systems for low-contamination operation. Co-deposition is possible, as is reactive sputtering via the gas/pressure control module that support up to 3 process gases. Chamber access is via a hinged lid, that opens to reveal a stage suitable for holding substrates up to 100mm diameter. Base pressures <5 × 10-7mbar Gases: Ar and N2 Targets: Ag, Al, Au, Cr, Co, CoFeB, Cu, Mn, Nb, Ni, NiCr, Pt, Ti Target 1: Pt Target 2: Au Target 3: interchangeable

  A new user training: Mike Crosby and Alan Burton
  

  Technical support: Mike Crosby and Alan Burton

  Risk assessment

  Risk Assessment for Returning to Work during the Covid-19 Lockdown Easing Period

Dielectric

• Ultratech Fiji plasma-enhanced ALD system. Standard precursors: Al, Si, Zn, Hf. Standard co-reagents: H₂O, O₂ plasma, O₃, N₂ plasma.
• Tetreon (Thermco) LPCVD system incorporating TEOS (Tetraethyl orthosilicate) chemistry allowing the deposition of high quality oxide films with thickness in the range of 10-4000nm.
• SVS 8 pocket electron beam evaporator. Integrated ion beam gun for in-situ etch prior and post deposition. Standard dielectrics: Al₂O₃, SiO₂, MgO. Other dielectrics available on request.