Micro Pattern Generator

Heidelberg Instruments μPG 101is an extremely economical and easy to use micro pattern generator for direct writing applications and low volume mask making. The system can be used for applications such as MEMS, Bio MEMS, Integrated Optics, Micro Fluidics or any other application that requires high precision, high-resolution microstructures.

The tabletop system features exchangeable write modes to meet the resolution and write speed requirements of specific application. It is a lithography system, which can produce sub-micron features. The small address grid allows placement of structures with very high accuracy. The real-time autofocus system monitors and corrects focus position during exposure, which guarantees high resolution and repeatability over the entire exposure area. Small address grid and real-time autofocus system are essential features for a professional micro pattern solution.

Applications for the µPG 101 include Semiconductors, Life Science, MEMS, Sensors, Actuators, Material Research, and any other application that requires microstructures.

• Write speed up to 90 mm²/ min
• Substrates up to 150 mm x 150 mm
• Structures down to 0.6 µm
• UV (375 nm, 70 mW) diode laser source
• Write Mode Mix and Match
• Optical Autofocus

• Multiple data input formats
• Basic gray scale exposure mode
• Camera system for alignment
• Multiple exchangeable write modes
• Vector and raster exposure mode