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Jeol 6100 EDAX

 6100 web

The Jeol 6100 EDAX


The Jeol 6100 is a scanning electron microscope (SEM) suitable for standard SEM imaging. The system also has a cathodoluminescence (CL) added, to allow the user to investigate optical and electronic defects of a material.

Specification for Jeol 6100 EDAX

  • Resolution 4 nm @ 30 kV
  • Accelerating voltage 0.3 to 30 kV
  • W/LaB6 filament
  • Gatan MonoCL3 CL system

Example Images

Reference Publications