As advanced technology becomes increasingly ubiquitous – green energy, automation, AI, electrification and more – industry demand for efficiency, performance and innovation is greater than ever. Warwick’s state-of-the-art cleanroom facility allows industry users to push the boundaries of electronic device fabrication down to the nanoscale, delivering maximum performance from every atom.

Challenges in industry

Microchips are prevalent in every aspect of modern life. They are a key part of any electronic device, consisting of millions or billions of interconnected electronic components that facilitate the flow of electric signals. Microchip components, called transistors, are formed by nanoscopic etching and layering on thin-sliced semiconductor wafers and can be miniaturised or functionalised in different ways.

In a typical smartphone, you can expect to find over a dozen chips, responsible for managing features such as camera autofocus and 5G connectivity. From satellites and probes in outer space, to glucose monitoring patches and pacemakers in the human body, microchips are everywhere.

Over the last two decades, the field of microelectronics has seen leaps and bounds in advancements. Specialised silicon structures are constantly emerging: MEMS (micro-electromechanical systems) are found in gyroscopes in smartphones and CMOS (complementary-metal-oxide-semiconductors) devices are found in digital cameras. A recent advancement in semiconductor materials is silicon carbide or SiC, which overcomes many of the limitations of silicon. It provides ultra-high efficiency in high power applications, unparalleled resistance to extreme conditions, and the ability to handle much higher voltages.

The need for unparalleled precision in microelectronic design is vital for consistency and reliability in chip production. The minimum requirement for conceptualising and fabricating these tiny chips is specialised equipment that functions at the atomic level, in an environment monitored to have low levels of airborne particles, with constant temperature and humidity.

Work with Warwick to help you drive innovation

The University of Warwick’s 150 m² ISO class 6 cleanroom has been at the forefront of SiC research for over 15 years and houses an extensive range of state-of-the-art equipment, enabling leaders in the microtechnology sector to push the boundaries of what is possible. Capabilities include:

• Lithography: Using UV light to transfer intricate patterns onto wafers, protecting and exposing microscopic zones.
• Etching and wet processing: Removing material at the atomic scale using acid, laser and plasma processes to create ultra-fine and ultra-clean microstructures.
• Deposition: Using processes driven by heat, plasmas and electron beams to add layers of metals, glasses and other materials to the surface of a wafer.
• Thermal oxidation and annealing: By utilising heat and chemical gases, wafers and layers can reorganise and transform to achieve perfect crystal and glass structures.
• Metrology: A suite of measuring equipment is used to ensure quality control, process optimisation and precision characteristics.

Temperature and humidity are highly stable across the facility and air is filtered to ISO6 levels, with > 8320 1 µm particles per cubic metre, 1000 times better than normal environments.

For more detail on the cleanroom equipment, see our Analytical Capability Guide.

Why Warwick?

• Advanced equipment and integration: The cleanroom’s state-of-the art facilities are well-integrated within the University’s extensive network of world-class research equipment, enabling easy access to complementary technologies.
• Training and support: Our technicians offer bespoke training to industry clients in advanced fabrication and characterisation techniques. Technical expertise from fabrication experts can be tapped to accelerate projects.
• Ease of access: The cleanroom is accessed through Warwick Scientific Services. Our secure online portal facilitates quick turnaround of contracting, including an NDA and MTA.

Success stories at Warwick

The Warwick cleanroom supports a spectrum of innovative projects, driving advancements in power electronics, materials science, and quantum technologies.

• Power electronics solutions: Partnering with manufacturers to leverage SiC to facilitate green energy transmission for efficient power electronics.
• Sustainable energy solutions: Improving silicon properties to enhance solar cell efficiency.
• Breakthrough healthcare technologies: Developing microfluidic devices to optimise drug delivery.
• Quantum technologies: Developing diamond quantum technologies to advance the field of quantum computing and geolocation.

Contact Us

Get in touch to discuss how we can help solve your challenges. Contact Claire Gerard, Warwick Scientific Services Manager ( ), or visit the cleanroom webpages.