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In addition to the fabrication capabilities, the cleanroom is also equipped with a suite of measurement and characterisation tools.

  • Polylite optical microscopy with image capture and measurement.
  • Rudolph Inc ellipsometer for transparent film refractive index and thickness measurements.
  • Ambios XP100 stylus profiler.
  • Wentworth probe station with Agilent B1500A parameter analyser.
  • SemiProbe semi-automated probe station with Keysight B1505A power device analyser.
  • Materials Development Corp (MDC) CV mercury probe station.
  • Four point probe station.

Person using microscope

Person using the probe station

Probe station








Profiler station with sample under test