In addition to the fabrication capabilities, the cleanroom is also equipped with a suite of measurement and characterisation tools.

• Polylite optical microscopy with image capture and measurement.
• Rudolph Inc ellipsometer for transparent film refractive index and thickness measurements.
• Ambios XP100 stylus profiler.
• Wentworth probe station with Agilent B1500A parameter analyser.
• SemiProbe semi-automated probe station with Keysight B1505A power device analyser.
• Materials Development Corp (MDC) CV mercury probe station.
• Four point probe station.

Probe station

 

 

 

 

 

 

 

Profiler