Skip to main content Skip to navigation

Agile microfabrication facility

The agile microfabrication facility is established to fabricate solid state devices down to micrometre scale and enable research excellence in materials science, electronics, photonics, thermoelectrics, spintronics, MEMS/NEMS, microfluidics, sensors, energy storage and other science and technology disciplines. The nature of the research means frequent alterations to devices layout and processes modifications are required.



  • Micro pattern generatorLink opens in a new window

    for direct writing applications and low volume mask making. The system can be used for applications such as Semiconductors, MEMS, Bio MEMS, Integrated Optics, Micro Fluidics or any other application that requires high precision, high-resolution microstructures.

suitable for routine surface cleaning and activation for a wide range of materials.


is a homebuilt microscope and micro-manipulator station purpose built for the fabrication of 2D heterostructures.

2D station

Equipment access request form

Induction to the agile microfabrication facility lectureLink opens in a new window

New users assessment formLink opens in a new window

Risk Assessment for Returning to Work during the Covid-19 Lockdown Easing PeriodLink opens in a new window

MPAGS lectures course: Introduction to Microfabrication of Solid State Devices

The next induction lecture to the agile microfabrication facility is scheduled to be via Microsoft Teams at 11:00-13:00 on

TBA (sign upLink opens in a new window)


Incident report formLink opens in a new window