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Agile microfabrication facility

The agile microfabrication facility is established to fabricate solid state devices down to micrometre scale and enable research excellence in materials science, electronics, photonics, thermoelectrics, spintronics, MEMS/NEMS, microfluidics, sensors, energy storage and other science and technology disciplines. The nature of the research means frequent alterations to devices layout and processes modifications are required.



  • Micro pattern generatorLink opens in a new window

    for direct writing applications and low volume mask making. The system can be used for applications such as Semiconductors, MEMS, Bio MEMS, Integrated Optics, Micro Fluidics or any other application that requires high precision, high-resolution microstructures.
  • UV curing chamber


suitable for routine surface cleaning and activation for a wide range of materials.

  • Microscope


is a homebuilt microscope and micro-manipulator station purpose built for the fabrication of 2D heterostructures.

2D station

Users area

Equipment access request form

A new user assessment formLink opens in a new window


The next induction lecture to the agile microfabrication facility is scheduled to be on Monday 12/02/2024 at 15:30 (sign upLink opens in a new window)


The next Agile microfabrication facility users workshop - April 2024


Incident report formLink opens in a new window