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Agile microfabrication facility

The agile microfabrication facility is established to fabricate solid state devices down to micrometre scale and enable research excellence in materials science, electronics, photonics, thermoelectrics, spintronics, MEMS/NEMS, microfluidics, sensors, energy storage and other science and technology disciplines. The nature of the research means frequent alterations to devices layout and processes modifications are required.

Microstructures

Equipment

  • Micro pattern generatorLink opens in a new window

    for direct writing applications and low volume mask making. The system can be used for applications such as Semiconductors, MEMS, Bio MEMS, Integrated Optics, Micro Fluidics or any other application that requires high precision, high-resolution microstructures.
upg101
lithofumecupboard
nanopvd_s10a

suitable for routine surface cleaning and activation for a wide range of materials.

plasma

is a homebuilt microscope and micro-manipulator station purpose built for the fabrication of 2D heterostructures.

2D station

Equipment access request form


Induction to the agile microfabrication facility lectureLink opens in a new window

New users assessment formLink opens in a new window


Risk Assessment for Returning to Work during the Covid-19 Lockdown Easing PeriodLink opens in a new window



MPAGS lectures course: Introduction to Microfabrication of Solid State Devices


The next induction lecture to the agile microfabrication facility is scheduled to be via Microsoft Teams at 11:00-13:00 on

TBA (sign upLink opens in a new window)

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Incident report formLink opens in a new window

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