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Agile microfabrication facility

The agile microfabrication facility is established to fabricate solid state devices down to micrometre scale and enable research excellence in materials science, electronics, photonics, thermoelectrics, spintronics, MEMS/NEMS, microfluidics, sensors, energy storage and other science and technology disciplines. The nature of the research means frequent alterations to devices layout and processes modifications are required.

Microstructures

Equipment

  • Micro pattern generator

    for direct writing applications and low volume mask making. The system can be used for applications such as Semiconductors, MEMS, Bio MEMS, Integrated Optics, Micro Fluidics or any other application that requires high precision, high-resolution microstructures.
upg101
  • Fume cupboard

    with photoresist spin coater, ultrasonic bath and hot plates.

lithofumecupboard
nanopvd_s10a

suitable for routine surface cleaning and activation for a wide range of materials.

plasma

is a homebuilt microscope and micro-manipulator station purpose built for the fabrication of 2D heterostructures.

2D station

(Equipment access request form)


References


Risk Assessment for Returning to Work during the Covid-19 Lockdown Easing Period



MPAGS lectures course: Introduction to Microfabrication of Solid State Devices


The next induction lecture to the agile microfabrication facility is scheduled to be via Microsoft Teams at 11:00-13:00 on

14th October 2020 (sign up)

23rd June 2020

14th April 2020

14th January 2020

14th October 2019