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Introduction to Microfabrication of Solid State Devices

Convenor: Maksym Myronov

Module Code: X

Module Name: Introduction to Microfabrication of Solid State Devices

Duration: 10 X lectures on Monday and Thursday at 10:00-11:00 starting from 19th October 2020

Location: Online via Microsoft Teams

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Module Details

Microfabrication is a process and a collection of technologies to fabricate miniature structures and devices down to micrometre scales. To fabricate a micro device, many or few processes have to be performed, one after the other, repeatedly. These processes typically include deposition or growth, patterning, etching, thermal treatment, polishing and many others. Thanks to microfabrication the semiconductor industry is emerged. It is one of the largest industries in the world. Semiconductors have had a monumental impact on our society. Semiconductor materials are the foundation of modern electronics including radio, computers, phones, and many other gadgets and devices. Anything that is computerized or uses radio waves contains semiconductor devices. Nowadays, most semiconductor devices are fabricated of or on Silicon and other group IV semiconductors. Silicon is cheap material with superior properties, easy to process and multifunctional. More and more new electronic devices have been changing our life style. They have changed research, entertainment, records keeping, travel and exploration. There is almost no business, profession, or industry that has not changed since the introduction of solid-state electronics in the last century.

The proposed lecture course makes an introduction to microfabrication of solid state devices. The course consists of 10 lectures, titles of which are outlined below.

1.Introduction

2.Clean rooms

3.Materials, substrates and wafers

4.Lithography

5.Etching: wet etching

6.Etching: dry etching

7.Thin films deposition: Physical Vapour Deposition

8.Thin films deposition: Chemical Vapour Deposition

9.Thermal treatments

10.Characterisation

Additional reading:

Stephen A. Campbell "The Science and Engineering of Microelectronic Fabrication", 2nd Ed. Hardcover – 15 Mar. 2001