The agile microfabrication facility is established to fabricate solid state devices down to micrometre scale and enable research excellence in materials science, electronics, photonics, thermoelectrics, spintronics, MEMS/NEMS, microfluidics, sensors, energy storage and other science and technology disciplines. The nature of the research means frequent alterations to devices layout and processes modifications are required.

Equipment

Micro pattern generatorLink opens in a new window for direct writing applications and low volume mask making. The system can be used for applications such as Semiconductors, MEMS, Bio MEMS, Integrated Optics, Micro Fluidics or any other application that requires high precision, high-resolution microstructures.
UV curing chamber
Fume cupboardLink opens in a new window with photoresist spin coater, ultrasonic bath and hot plates.
Magnetron sputtering systemLink opens in a new window with RF power supplies for deposition of metals or insulating materials such as oxides or nitrides.
Plasma treatment systemLink opens in a new window suitable for routine surface cleaning and activation for a wide range of materials.
Microscope
2D heterostructures fabrication stationLink opens in a new window is a homebuilt microscope and micro-manipulator station purpose built for the fabrication of 2D heterostructures.

Users area

Equipment access request form

A new user assessment formLink opens in a new window

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The next induction lecture to the agile microfabrication facility is scheduled to be on Monday 12/02/2024 at 15:30 (sign upLink opens in a new window)

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The next Agile microfabrication facility users workshop - April 2024

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Incident report formLink opens in a new window

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